JPS642109U - - Google Patents

Info

Publication number
JPS642109U
JPS642109U JP9566287U JP9566287U JPS642109U JP S642109 U JPS642109 U JP S642109U JP 9566287 U JP9566287 U JP 9566287U JP 9566287 U JP9566287 U JP 9566287U JP S642109 U JPS642109 U JP S642109U
Authority
JP
Japan
Prior art keywords
moving body
mirror
linear position
receiving element
light source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9566287U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0535286Y2 (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9566287U priority Critical patent/JPH0535286Y2/ja
Publication of JPS642109U publication Critical patent/JPS642109U/ja
Application granted granted Critical
Publication of JPH0535286Y2 publication Critical patent/JPH0535286Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP9566287U 1987-06-22 1987-06-22 Expired - Lifetime JPH0535286Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9566287U JPH0535286Y2 (en]) 1987-06-22 1987-06-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9566287U JPH0535286Y2 (en]) 1987-06-22 1987-06-22

Publications (2)

Publication Number Publication Date
JPS642109U true JPS642109U (en]) 1989-01-09
JPH0535286Y2 JPH0535286Y2 (en]) 1993-09-08

Family

ID=30960453

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9566287U Expired - Lifetime JPH0535286Y2 (en]) 1987-06-22 1987-06-22

Country Status (1)

Country Link
JP (1) JPH0535286Y2 (en])

Also Published As

Publication number Publication date
JPH0535286Y2 (en]) 1993-09-08

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